A User's Guide to Ellipsometry

Download or read book A User's Guide to Ellipsometry written by Harland G. Tompkins and published by Academic Press. This book was released on 1993 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement of film thickness and optical constants in films. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films.