Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications

Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications
Author :
Publisher : SPIE-International Society for Optical Engineering
Total Pages : 240
Release :
ISBN-10 : 0819450669
ISBN-13 : 9780819450661
Rating : 4/5 (661 Downloads)

Book Synopsis Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications by : Ali M. Khounsary

Download or read book Advances in Mirror Technology for X-ray, EUV Lithography, Laser and Other Applications written by Ali M. Khounsary and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.


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