Design a Cylinder HDP Semiconductor Plasma Dry Etcher

Download or read book Design a Cylinder HDP Semiconductor Plasma Dry Etcher written by Kung Linliu and published by . This book was released on 2020-11-08 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt: A special shape of cylinder metal roller is designed for the truly seamless anti-fake product. And it is manufactured by the traditional lithography and electroforming process. However, it is suffered by the complex manufacturing procedure and complicated chemical parameters then the yield rate is not as expected from the original designing concept.In order to overcome the difficulties of the manufacturing procedures, the novel concept of cylinder shape HDP plasma dry etching of metal roller from semiconductor IC process is proposed and applied to a patent.