Design a Slit HDP Semiconductor Plasma Dry Etcher
| Author | : Kung Linliu |
| Publisher | : |
| Total Pages | : 140 |
| Release | : 2020-11-08 |
| ISBN-10 | : 9798561298431 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Design a Slit HDP Semiconductor Plasma Dry Etcher by : Kung Linliu
Download or read book Design a Slit HDP Semiconductor Plasma Dry Etcher written by Kung Linliu and published by . This book was released on 2020-11-08 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt: In order to overcome the difficulties of the manufacturing procedures, the novel concept of slit shape HDP plasma dry etching of metal roller from semiconductor IC process is proposed and applied to a patent.
