Scanning Electron Microscopy

Download or read book Scanning Electron Microscopy written by Ludwig Reimer and published by Springer. This book was released on 2013-11-11 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.