Fabrication and Evaluation of RF Sputtered Barium Titanate Thin Films

Download or read book Fabrication and Evaluation of RF Sputtered Barium Titanate Thin Films written by I. H. Pratt and published by . This book was released on 1972 with total page 41 pages. Available in PDF, EPUB and Kindle. Book excerpt: Structural, chemical, dielectric, and ferroelectric (limited) characteristics of RF sputtered barium titanate (BaTiO3) are described. Primary interest was to determine film capability for providing high capacitance devices for hybrid and thin film integrated circuits. The extent of ferroelectric film behavior was also of concern for charge storage use in the development of thin film image plates for miniature solid state facsimile cameras. Metal-dielectric-metal capacitor structures incorporating amorphous or polycrystalline BaTiO3 films were fabricated and evaluated. (Author).