Fabrication Engineering at the Micro and Nanoscale
| Author | : Stephen A. Campbell |
| Publisher | : OUP USA |
| Total Pages | : 0 |
| Release | : 2008-01-10 |
| ISBN-10 | : 0195320174 |
| ISBN-13 | : 9780195320176 |
| Rating | : 4/5 (176 Downloads) |
Book Synopsis Fabrication Engineering at the Micro and Nanoscale by : Stephen A. Campbell
Download or read book Fabrication Engineering at the Micro and Nanoscale written by Stephen A. Campbell and published by OUP USA. This book was released on 2008-01-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
