Fundamental Electron Interactions with Plasma Processing Gases

Download or read book Fundamental Electron Interactions with Plasma Processing Gases written by Loucas G. Christophorou and published by Springer Science & Business Media. This book was released on 2004 with total page 806 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.