A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of

The use of ion beams for materials analysis involves many different ion-atom interaction processes which previously have largely been considered in separate rev

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issu

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related t