Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c

"New results in the field of ion implantation from the experienced scientists from different countries are presented in this book. Influence of ion implantation

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of

Comprehensive guide to an important materials science technique for students and researchers.