Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions
| Author | : Reid Alyn Brennen |
| Publisher | : |
| Total Pages | : 476 |
| Release | : 1993 |
| ISBN-10 | : UCAL:C3372071 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions by : Reid Alyn Brennen
Download or read book Large Displacement Electrostatic Microactuators with Polysilicon Flexure Suspensions written by Reid Alyn Brennen and published by . This book was released on 1993 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:
