Mems/Nems
| Author | : Cornelius T. Leondes |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 2142 |
| Release | : 2007-10-08 |
| ISBN-10 | : 9780387257860 |
| ISBN-13 | : 0387257861 |
| Rating | : 4/5 (861 Downloads) |
Download or read book Mems/Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
