Advanced MEMS Packaging

Advanced MEMS Packaging
Author :
Publisher : McGraw Hill Professional
Total Pages : 577
Release :
ISBN-10 : 9780071627924
ISBN-13 : 0071627928
Rating : 4/5 (928 Downloads)

Book Synopsis Advanced MEMS Packaging by : John H. Lau

Download or read book Advanced MEMS Packaging written by John H. Lau and published by McGraw Hill Professional. This book was released on 2009-10-22 with total page 577 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to 3D MEMS packaging methods and solutions Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and packaging. This authoritative guide presents cutting-edge MEMS (microelectromechanical systems) packaging techniques, such as low-temperature C2W and W2W bonding and 3D packaging. This definitive resource helps you select reliable, creative, high-performance, robust, and cost-effective packaging techniques for MEMS devices. The book will also aid in stimulating further research and development in electrical, optical, mechanical, and thermal designs as well as materials, processes, manufacturing, testing, and reliability. Among the topics explored: Advanced IC and MEMS packaging trends MEMS devices, commercial applications, and markets More than 360 MEMS packaging patents and 10 3D MEMS packaging designs TSV for 3D MEMS packaging MEMS wafer thinning, dicing, and handling Low-temperature C2C, C2W, and W2W bonding Reliability of RoHS-compliant MEMS packaging Micromachining and water bonding techniques Actuation mechanisms and integrated micromachining Bubble switch, optical switch, and VOA MEMS packaging Bolometer and accelerameter MEMS packaging Bio-MEMS and biosensor MEMS packaging RF MEMS switches, tunable circuits, and packaging


Advanced MEMS Packaging Related Books

Advanced MEMS Packaging
Language: en
Pages: 577
Authors: John H. Lau
Categories: Technology & Engineering
Type: BOOK - Published: 2009-10-22 - Publisher: McGraw Hill Professional

DOWNLOAD EBOOK

A comprehensive guide to 3D MEMS packaging methods and solutions Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for tho
MEMS Packaging
Language: en
Pages: 310
Authors: Tai-Ran Hsu
Categories: Technology & Engineering
Type: BOOK - Published: 2004 - Publisher: IET

DOWNLOAD EBOOK

This book covers the entire spectrum of assembly, packaging and testing of MEMs (microelectro-mechanical systems) and microsystems, from essential enabling tech
Mems Packaging
Language: en
Pages: 363
Authors: Yung-cheng Lee
Categories: Technology & Engineering
Type: BOOK - Published: 2018-01-03 - Publisher: World Scientific

DOWNLOAD EBOOK

MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical ac
Nano-Bio- Electronic, Photonic and MEMS Packaging
Language: en
Pages: 761
Authors: C.P. Wong
Categories: Technology & Engineering
Type: BOOK - Published: 2009-12-23 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Nanotechnologies are being applied to the biotechnology area, especially in the area of nano material synthesis. Until recently, there has been little research
3D and Circuit Integration of MEMS
Language: en
Pages: 528
Authors: Masayoshi Esashi
Categories: Technology & Engineering
Type: BOOK - Published: 2021-03-16 - Publisher: John Wiley & Sons

DOWNLOAD EBOOK

Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building