Metal Impurities in Silicon-Device Fabrication

Download or read book Metal Impurities in Silicon-Device Fabrication written by Klaus Graff and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.