Micro-Nano Technology XIII

Download or read book Micro-Nano Technology XIII written by Xiao Hao Wang and published by Trans Tech Publications Ltd. This book was released on 2012-02-10 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology.. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology.