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Microelectronic Applications of Chemical Mechanical Planarization
Language: en
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Authors: Yuzhuo Li
Categories: Technology & Engineering
Type: BOOK - Published: 2007-10-19 - Publisher: John Wiley & Sons

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An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of pl
Chemical Mechanical Planarization of Microelectronic Materials
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Authors: Joseph M. Steigerwald
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Type: BOOK - Published: 2008-09-26 - Publisher: John Wiley & Sons

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Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its univ
Microelectronic Applications of Chemical Mechanical Planarization
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Authors: Yuzhuo Li
Categories: Technology & Engineering
Type: BOOK - Published: 2007-12-04 - Publisher: John Wiley & Sons

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An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of pl
Advances in Chemical Mechanical Planarization (CMP)
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Authors: Babu Suryadevara
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Type: BOOK - Published: 2021-09-10 - Publisher: Woodhead Publishing

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Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, hi
Chemical-Mechanical Planarization of Semiconductor Materials
Language: en
Pages: 444
Authors: M.R. Oliver
Categories: Technology & Engineering
Type: BOOK - Published: 2004-01-26 - Publisher: Springer Science & Business Media

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This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor te