Micromachined Transducers Sourcebook

Download or read book Micromachined Transducers Sourcebook written by Gregory T. A. Kovacs and published by McGraw-Hill Science, Engineering & Mathematics. This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of the field, beginning with micromachining approaches and including all major categories of transduction. It examines the fabrication of individual devices through the study of design issues and provides examples of key transducers, or structures, for comparison of performances obtainable through different approaches.