Related Books

Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films
Language: en
Pages: 210

Modelling and Experimental Study of Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films

Authors: Chue-san Yoo
Categories: Vapor-plating
Type: BOOK - Published: 1988 - Publisher:

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Modeling of Plasma-enhanced Chemical Vapor Deposited Silicon Nitride Thin Films Into Confined Geometries
Language: en
Pages: 460

Modeling of Plasma-enhanced Chemical Vapor Deposited Silicon Nitride Thin Films Into Confined Geometries

Authors: Ronald James Spence
Categories: Plasma-enhanced chemical vapor deposition
Type: BOOK - Published: 1993 - Publisher:

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Thermal and Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films
Language: en
Pages: 212

Thermal and Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films

Authors: Sui-Yuan Lynn
Categories: Silicon nitride
Type: BOOK - Published: 1987 - Publisher:

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Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane
Language: en
Pages: 286

Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane

Authors: Todd Alan Brooks
Categories:
Type: BOOK - Published: 1988 - Publisher:

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The Growth of Silicon Nitride Crystalline Films Using Microwave Plasma Enhanced Chemical Vapor Deposition
Language: en
Pages: 31

The Growth of Silicon Nitride Crystalline Films Using Microwave Plasma Enhanced Chemical Vapor Deposition

Authors:
Categories:
Type: BOOK - Published: 1994 - Publisher:

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Crystalline thin films of silicon nitride have been grown on a variety of substrates by microwave plasma-enhanced chemical vapor deposition using N2, O2, and CH