The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p

This book is written for new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formatio

This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were

Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses