Periodic Mesoporous Organosilica and Silica
Author | : Wendong Wang |
Publisher | : |
Total Pages | : 292 |
Release | : 2011 |
ISBN-10 | : 0494776730 |
ISBN-13 | : 9780494776735 |
Rating | : 4/5 (735 Downloads) |
Download or read book Periodic Mesoporous Organosilica and Silica written by Wendong Wang and published by . This book was released on 2011 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: Periodic mesoporous material is a class of solids that possess periodically ordered pores with sizes of 2--50 nm. After a brief introduction to the synthesis, structure, property and function of periodic mesoporous materials in general in Chapter 1, a specific type of periodic mesoporous material, periodic mesoporous organosilica (PMO), is examined in detail in Chapter 2. Chapter 3 and Chapter 4 focus on the application of periodic mesoporous organosilica as low-dielectric-constant (low-k) insulating materials on semiconductor microprocessors. Specifically, Chapter 3 introduces a vapor-phase delivery technique, vacuum-assisted aerosol deposition, for the synthesis of PMO thin films; Chapter 4 studies one property crucial for the application of low-k PMO in detail--hydrophobicity. The focus of Chapter 5 turns to a novel sandwich-structured nanocomposite made of periodic mesoporous silica and graphene oxide. In Chapter 6, progress towards the synthesis of periodic mesoporous quartz is summarized. A conclusion and an outlook are given in Chapter 7.