Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of de

This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packag

Nanotechnologies are being applied to the biotechnology area, especially in the area of nano material synthesis. Until recently, there has been little research

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoele

The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumpt