Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane
| Author | : Todd Alan Brooks |
| Publisher | : |
| Total Pages | : 286 |
| Release | : 1988 |
| ISBN-10 | : UCAL:$C71951 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane by : Todd Alan Brooks
Download or read book Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane written by Todd Alan Brooks and published by . This book was released on 1988 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt:
