Polycrystalline Silicon Germanium for Fabrication, Release, and Packaging of Microelectromechanical Systems

Polycrystalline Silicon Germanium for Fabrication, Release, and Packaging of Microelectromechanical Systems
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Publisher :
Total Pages : 272
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ISBN-10 : UCAL:C3448253
ISBN-13 :
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Book Synopsis Polycrystalline Silicon Germanium for Fabrication, Release, and Packaging of Microelectromechanical Systems by : John McCaslin Heck

Download or read book Polycrystalline Silicon Germanium for Fabrication, Release, and Packaging of Microelectromechanical Systems written by John McCaslin Heck and published by . This book was released on 2001 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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