In this book, the design, manufacture and control technology of precision machines are introduced to achieve the concrete requirements for precision engineering

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical

Advances in engineering precision have tracked with technological progress for hundreds of years. Over the last few decades, precision engineering has been the

This book is a comprehensive engineering exploration of all the aspects of precision machine design—both component and system design considerations for precis