Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films

Author	: Jung Won Cho
Publisher	:
Total Pages	: 227
Release	: 2002
ISBN-10	: OCLC:52972142
ISBN-13	:
Rating	: 4/5 ( Downloads)

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Book Synopsis Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films by : Jung Won Cho

Download or read book Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films written by Jung Won Cho and published by . This book was released on 2002 with total page 227 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: plasma diagnostics, thermal conductivity, AlN, pulsed DC sputtering.

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Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films

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