This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and

The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applic

This book introduces an innovative and high-efficiency technology for mechanical energy harvesting. The book covers the history and development of triboelectric

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an