Silicon Anodization as a Structuring Technique

Silicon Anodization as a Structuring Technique
Author :
Publisher : Springer
Total Pages : 335
Release :
ISBN-10 : 9783658192389
ISBN-13 : 3658192380
Rating : 4/5 (380 Downloads)

Book Synopsis Silicon Anodization as a Structuring Technique by : Alexey Ivanov

Download or read book Silicon Anodization as a Structuring Technique written by Alexey Ivanov and published by Springer. This book was released on 2017-09-10 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​


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