Silicon Anodization as a Structuring Technique

Download or read book Silicon Anodization as a Structuring Technique written by Alexey Ivanov and published by Springer. This book was released on 2017-09-10 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​