This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the

Many bottom-up and top-down techniques for nanomaterial and nanostructure generation have enabled the development of applications in nanoelectronics and nanopho

The Encyclopedia of Modern Optics, Second Edition, Five Volume Set provides a wide-ranging overview of the field, comprising authoritative reference articles fo

The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational co

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material