12. The Production and Transmission of High Purity Gases for the Semiconductor Industry / R. Galbraith -- 13. Materials for Services Pipework / T. Hodgkiess.

This practical book provides detailed guidance on all aspects of clean room airflow, the mechanics of airflow, and how microbial contamination is carried. Ljung

A self-contained and practical book providing step-by-step guidance to the design and construction of cleanrooms, appropriate testing methodologies, and operati

A central resource of technology and methods for environments where the control of contamination is critical.