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Design, Test, and Microfabrication of MEMS and MOEMS
Language: en
Pages: 694

Design, Test, and Microfabrication of MEMS and MOEMS

Authors: Bernard Courtois
Categories: Computer-aided design
Type: BOOK - Published: 1999 - Publisher:

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Design, Test, and Microfabrication of MEMS and MOEMS
Language: en
Pages: 648

Design, Test, and Microfabrication of MEMS and MOEMS

Authors:
Categories: Computer-aided design
Type: BOOK - Published: 1999 - Publisher:

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MOEMS
Language: en
Pages: 640

MOEMS

Authors: M. Edward Motamedi
Categories: Technology & Engineering
Type: BOOK - Published: 2005 - Publisher: SPIE Press

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This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics
MOEMS and Miniaturized Systems
Language: en
Pages: 388

MOEMS and Miniaturized Systems

Authors:
Categories: Microelectromechanical systems
Type: BOOK - Published: 2001 - Publisher:

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Fundamentals of Microfabrication
Language: en
Pages: 764

Fundamentals of Microfabrication

Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-08 - Publisher: CRC Press

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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecula