The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

The fabrication of Si- and compound semiconductor-based devices involves a number of steps ranging from material growth to pattern definition by lithography, an