Fundamental Principles of Engineering Nanometrology

Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by William Andrew. This book was released on 2009-09-03 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge