The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p

This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin

"In this practical handbook, Paul Croft offers a comprehensive approach to the many aspects of lithography. Through simplified steps the information is presente

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were