Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wir

The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packag

This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide ma