This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipli

Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunit

The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packag

This concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. Completely revised, this edition has exp

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct fu