Wafer Bonding
| Author | : Marin Alexe |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 510 |
| Release | : 2013-03-09 |
| ISBN-10 | : 9783662108277 |
| ISBN-13 | : 3662108275 |
| Rating | : 4/5 (275 Downloads) |
Book Synopsis Wafer Bonding by : Marin Alexe
Download or read book Wafer Bonding written by Marin Alexe and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 510 pages. Available in PDF, EPUB and Kindle. Book excerpt: The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.
