This volume is a researcher's reference handbook to the many aspects of nanometer structures. Although intended as a source for the serious researcher, novices

Multiscale simulations of atomistic/continuum coupling in computational materials science, where the scale expands from macro-/micro- to nanoscale, has become a

VLSI Electronics Microstructure Science, Volume 16: Lithography for VLSI treats special topics from each branch of lithography, and also contains general discus

The three volumes of this handbook treat the fundamentals, technology and nanotechnology of nitride semiconductors with an extraordinary clarity and depth. They

From the reviews: "...A class in nanoscale science and technology is daunting for the educator, who must organize a large collection of materials to cover the f