Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the f

Miniaturization and mass replications have begun to lead the optical industry in the transition from traditional analog to novel digital optics. As digital opti

The physical design flow of any project depends upon the size of the design, the technology, the number of designers, the clock frequency, and the time to do th

This book is intended to familiarize the reader with the method of Gaussian matrices and some related tools of optical design. The matrix method provides a mean

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p