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Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Silicon Nitride
Language: en
Pages: 118

Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Silicon Nitride

Authors: William H. Ritchie
Categories: Plasma (Ionized gases)
Type: BOOK - Published: 1986 - Publisher:

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Carbide, Nitride and Boride Materials Synthesis and Processing
Language: en
Pages: 675

Carbide, Nitride and Boride Materials Synthesis and Processing

Authors: A.W. Weimer
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Carbide, Nitride and Boride Materials Synthesis and Processing is a major reference text addressing methods for the synthesis of non-oxides. Each chapter has be
Thermal and Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films
Language: en
Pages: 212

Thermal and Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films

Authors: Sui-Yuan Lynn
Categories: Silicon nitride
Type: BOOK - Published: 1987 - Publisher:

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Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane
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Plasma-enhanced Chemical Vapor Deposition of Silicon Nitride from 1,1,3,3,5,5,-hexamethylcyclotrisilazane

Authors: Todd Alan Brooks
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Type: BOOK - Published: 1988 - Publisher:

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Silicon Nitride and Silicon Dioxide Thin Insulating Films
Language: en
Pages: 306

Silicon Nitride and Silicon Dioxide Thin Insulating Films

Authors:
Categories: Silicon dioxide
Type: BOOK - Published: 2001 - Publisher:

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