Silicides were introduced into the technology of electronic devices some thirty years ago; since then, they have been continuously used to form both ohmic and r

A comprehensive presentation and analysis of properties and methods of formation of semiconducting silicides. Fundamental electronic, optical and transport prop

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk s

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to