Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevic

The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrol

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (M

This book is a printed edition of the Special Issue "Micro/Nano Manufacturing" that was published in Micromachines

Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. Th