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Language: en
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Pages: 312
Type: BOOK - Published: 2021-10-12 - Publisher: Springer Nature
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) an
Language: en
Pages: 242
Pages: 242
Type: BOOK - Published: 2019-11-20 - Publisher: MDPI
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e
Language: en
Pages: 2142
Pages: 2142
Type: BOOK - Published: 2007-10-08 - Publisher: Springer Science & Business Media
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and t
Language: en
Pages: 85
Pages: 85
Type: BOOK - Published: 2019-02-28 - Publisher: Springer
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and
Language: en
Pages: 242
Pages: 242
Type: BOOK - Published: 2019 - Publisher:
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly e
