Atomic Collisions on Solid Surfaces

Download or read book Atomic Collisions on Solid Surfaces written by E. S. Parilis and published by North Holland. This book was released on 1993 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the theory of collisions of medium-energy atoms on the surface of a solid and the accompanying effects, namely, atom and molecule scattering, charge exchange, sputtering of atoms and large biomolecules, ion and electron emission. The topics covered include analytical theories and computer investigations which the authors made over the past 30 years. Special attention is paid to the development of the models and mechanisms for the phenomena occurring at atomic collisions on solid surfaces. The secondary processes are described for the various combinations of incident ions and a solid. Single- and multiple-charged ions are used as the incident ions bombarding targets being different both in structure (single crystal, polycrystal and amorphous) and electronic properties (metal, semiconductor and insulator). One of the major goals of the studies discussed is the development of a theoretical foundation for the diagnostics of the composition, structure and state of the surface of solids and thin films, as well as for their quality control in present day technology. The book will be of interest to all those involved in ion-solid interaction studies.