Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, log

This book describes semiconductors from a materials science perspective rather than from condensed matter physics or electrical engineering viewpoints. It inclu

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their proper

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chem

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new