CCD Image Sensors in Deep-Ultraviolet

Download or read book CCD Image Sensors in Deep-Ultraviolet written by Flora Li and published by Springer Science & Business Media. This book was released on 2006-01-05 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.