Characteristics of Rf Sputtered Barium Titanate Films on Silicon

Download or read book Characteristics of Rf Sputtered Barium Titanate Films on Silicon written by C. A. T. Salama and published by . This book was released on 1971 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: The physical and electrical properties of barium titanate films approximately 1 micrometer thick, prepared by rf sputtering onto silicon substrates in both pure argon and 95% argon-5% oxygen glow discharges were investigated. The deposition rate, crystal structure, and refractive index of the films were investigated as a function of deposition temperature and sputtering gas. The electrical characteristics of the films, including the dielectric constant, loss tangent, conductivity, insulator bulk charge, charge storage at the BaTiO3-SiO2 interface, and ferroelectricity were also investigated. (Author).