Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators
| Author | : Patrick Ching-Pak Cheung |
| Publisher | : |
| Total Pages | : 522 |
| Release | : 1995 |
| ISBN-10 | : UCAL:C3386419 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators by : Patrick Ching-Pak Cheung
Download or read book Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-micromachined Polysilicon Microactuators written by Patrick Ching-Pak Cheung and published by . This book was released on 1995 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt:
