Fabrication Engineering at the Micro and Nanoscale

Author	: Stephen A. Campbell
Publisher	: OUP USA
Total Pages	: 0
Release	: 2008-01-10
ISBN-10	: 0195320174
ISBN-13	: 9780195320176
Rating	: 4/5 (176 Downloads)

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Book Synopsis Fabrication Engineering at the Micro and Nanoscale by : Stephen A. Campbell

Download or read book Fabrication Engineering at the Micro and Nanoscale written by Stephen A. Campbell and published by OUP USA. This book was released on 2008-01-10 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.

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