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Field Guide to Optical Lithography
Language: en
Pages: 122
Authors: Chris A. Mack
Categories: Technology & Engineering
Type: BOOK - Published: 2006 - Publisher: Society of Photo Optical

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This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit
Field Guide to Digital Micro-optics
Language: en
Pages: 172
Authors: Bernard C. Kress
Categories: Diffraction gratings
Type: BOOK - Published: 2014 - Publisher:

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Traditional macro-optics can be designed without complex design software tools. However, digital optics, especially wafer-scale micro-optics, require specific s
Field Guide to Optical Fabrication
Language: en
Pages: 0
Authors: Ray Williamson
Categories: Optical instruments
Type: BOOK - Published: 2011 - Publisher: SPIE-International Society for Optical Engineering

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Provides optical designers, shop managers, opticians, and purchasers a concise reference explaining what the designer needs to know before making final choices
Optical Lithography
Language: en
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Authors: Burn Jeng Lin
Categories: Lasers
Type: BOOK - Published: 2021 - Publisher: SPIE-International Society for Optical Engineering

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This book is written for new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formatio
Fundamental Principles of Optical Lithography
Language: en
Pages: 503
Authors: Chris Mack
Categories: Technology & Engineering
Type: BOOK - Published: 2011-08-10 - Publisher: John Wiley & Sons

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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p