Image Formation in Low-voltage Scanning Electron Microscopy

Download or read book Image Formation in Low-voltage Scanning Electron Microscopy written by Ludwig Reimer and published by SPIE Press. This book was released on 1993 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt: While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependence of SE yield and the backscattering coefficient on electron energy, surface tilt, and material as well as the angular and energy distributions; and types of image contrast and the differences between LVSEM and conventional SEM modes due to the influence of electron-specimen interactions.